Variety of Single and Multi-Axis Piezo NanoPositioning Stages.
PI offers the largest variety of custom and standard ultra-low inertia NanoPositioning Solutions. 
 

Examples for Parallel-Kinematics NanoPositioning Systems 

• P-500 Series Stages (XY, XYZ, XY-Theta-Z, Z-Tip-Tilt). Capacitive Feedback, Clear Aperture. 
• P-587 6-DOF NanoPositioning Stage.  Most Advanced Nanopositioning Stage.  Travel to 800 µm and 1 mrad. 
• P-733 XY NanoPositioning Stage. Capacitive Feedback, Clear Aperture. 
• P-734 Ultra-High Flatness XY NanoPositioning Stage. Capacitive Feedback, Clear Aperture. 

• Variety of Custom NanoPositioning Stages 

 

Ultra-Low-Inertia NanoPositioning Systems, Ultra-High Precision Position Sensors

Ultra-low-inertia solid state PZT nanopositioning stages can repeatedly move bidirectional nanometer level steps, up to hundreds of Hz if required. 
Two plate capacitive position sensors ensure highest linearity and longterm stability. 
These absolute measuring, nont-contact  sensors detect motion at sub-nanometer levels directly (direct output metrology) and provide superior accuracy, linearity, resolution, stability and bandwidth to Strain Gauge type sensors (Piezo Resistive Sensors) LVDT sensors and incremental encoders (glass scale type encoders).  If used in parallel-kinematics multi-axis systems, they can also provide the information for an automatic runout-compensation.

Minimized recoil forces are a by-product of the ultra-low inertia approach.  Classical Micropositioning stages, even when equipped with high-resolution encoders cannot achieve this precision.  The high inertia, friction, and servo dither prevents fast motion at the nanometer level.

Click here for more information on PI Capacitive Position Sensors 

The example above shows ringing of a poorly damped component on a high-speed NanoPositioning stage.  While the closed-loop NanoPositioning stage settles perfectly, the component cannot keep up. Conventional solutions to this problem would suggest slowing down the NanoPositioning stage.  Mach™ eliminates ringing without sacrificing speed. 
It does not even require retuning of the servo system.

Mach™ Throughput Processor Eliminates Self-Generated Vibration, Increases Troughput, Scanning Speed, Accuracy. 

The exclusive Mach™ Throughput Processor™ eliminates resonant ringing, allowing rapid motion without settling. This technique also eliminates resonances excited in neighboring components outside the nanopositioning system's servo loop.  The result is significantly increased throughput. 

Self-generated vibration affects:

• The load and fixturing that the nanopositioner actuates, 
• The supporting structure to which the nanopositioner is mounted, and
• All other components attached to the supporting structure.

The example above shows vibrations induced at the beginning of a saw-tooth scan, typical in image acquisition applications. The vibration results in lower image quality.  Mach™ improves the image quailtiy; there is no need to reduce the scanning frequency or changing the mechanical components in the system.

Mach™ is available as an option for several PI Digital Piezo Controllers and also as an upgrade option for analog controllers.

If you need to achieve nanometer precision faster, request our technote on 
Mach™ and talk to a PI application engineer:
 

Active Trajectory Control.

If you need ultra-precise motion, straighter or flatter, request our technote 
and talk to a PI application engineer:

  508-832-3456 (EAST)
  714-850-1835 (WEST)

Adaptive Preshaping/ Auto-Learning Controllers

Preshaping™ algorithms and adaptive following-error elimination algorithms can increase the linearity and effective bandwidth of high-speed nanopositioning systems by up to 10000%.  This translates into higher dynamic accuracy, and increased throughput. 

Applications range from out-of-round machining (pistons, contactlenses, optics) to scanning microscopy.

If you need higher linearity in dynamic nanometer-level motion systems,  request our technote and talk to a PI application engineer:

  508-832-3456 (EAST)
  714-850-1835 (WEST)

Flexure Technology

PI multi-axis NanoPositioning systems are based on wire EDM cut parallel-kinematics 
designs.
 

Pro: Simple.  Con:  Slower response (lower stage carries inertial mass of upper stage); Non-symmetric resonant frequencies (lower stage is slower than upper stage, requires different servo settings). Orthogonality error is mounting-angle dependant. Runout in Y cannot be monitored/compensated by the sensor in the X stage or vice versa.	A) Stacking 2 single-axis stages .
Better response than A) but still non-symmetric and X and Y work without "knowledge" of each other.	B) Single module (monolithic) but nested (serial) X and Y.
Best solution.    Same ultra-low inertia for X and Y motion, providing higher responsiveness and axis-independent performance.  Excellent, mounting independent orthogonality.  Reduced runout: X sensor (PI uses non-contact two plate capacitance sensors) can monitor and correct for Y runout and vice versa.  Additional rotation axis (Theta z ) feasible with 3 actuators / sensors and digital controller.	C) Single-module parallel-kinematics X and Y (with crosstalk compensation).