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| Nano-Precision Actuators: Piezoelectric / Motorized Actuator Solutions for Motion Control Applications
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| NEXLINE® / NEXACT® Nanopositioning Linear Actuators |
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| N-310 Compact NEXACT® OEM Piezo Stepping Drives with Long Travel Ranges
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- 10 mm/sec Speed
- 20 mm Standard Travel Range
- Compact and Cost-Effective Design
- 0.03 nm Resolution
- To 10 N Push/Pull Force
- Low Operating Voltage (40 V)
- Self Locking, with no Heat Dissipation, Nanometer Stability
- Non-Magnetic and Vacuum-Compatible Working Principle
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| N-111 NEXLINE® Miniature High-Load Piezo Nanopositioning Drive
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- Winner of the SEMI Technology Innovation Showcase Award
- 5 mm Travel Range
- <0.1 Nanometer Resolution
- Active Force Generation to 30 N
- >50 N Holding Force Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
N-111
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| N-214 NEXLINE® High-Load Piezo Nanopositioning Actuator
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- Winner of the SEMI Technology Innovation Showcase Award
- 20 mm Travel Range, <0.1 Nanometer Resolution
- Integrated High-Resolution Incremental Encoder
- Active Force Generation to 400 N
- >600 N Holding Force, Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
N-214
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| Ultrasonic Linear Actuators / Motors |
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| M-674 PILine® RodDrive PiezoMotor Actuators
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- Drive-Component for Integration into Precision Positioning Systems
- Flexible Choice of Travel Ranges to Several 100 mm
- Flexible Choice of Push/Pull Forces to Several 10 N
- Minimum Incremental Motion to 50 Nanometers
- Velocity to 400 mm/s
- Self-Locking
- Non Magnetic Option
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| P-653 PILine® Miniature Linear Motor / Slide
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- True Linear Motor Slide / No Rotary Conversion Losses
- Cost-Effective OEM Drive for High Quantity-Applications
- Preassembled and Mounted on a PCB Board
- Very Compact: Piezomotor Drive is Only 8 mm Long
- Fast Response: Full Stroke in <50 ms
- Force Generation to 0.15 N
- Self Locking at Rest
- Travel Range 2 mm, Velocity up to 200 mm/s
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PDF Datasheet
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HTML Online Catalog Datasheet
P-653
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| P-652 PILine® Micro Piezomotor Actuator
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- Cost-Effective, High-Volume-Production Drive
- Piezo Micro-Motor: 9.0 x 6.5 x 2.4 mmł
- Travel Range 3.2 mm
- Velocity to 80 mm/s
- Self-Locking
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
P-652
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| P-661 PILine® Miniature High-Speed, Ultrasonic Piezo Linear Motor for OEMs
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- Patented Principle Features Very Compact Dimensions
- Velocity to 600 mm/s
- Acceleration to 15 g
- Minimum Incremental Motion to 50 Nanometers
- Self-Locking to 1.5 N
- 20000 h MTBF
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
P-661
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| M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motor Actuators
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- 20 mm Travel Range
- Velocity to 500 mm/s
- Acceleration to 20 g
- Resolution to 50 Nanometer
- Self-Locking
- XY-Combinations Available
- 20000 h MTBF
- Vacuum Versions to 10-7 hPa
- Non Magnetic Option
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| M-663 PILine® Miniature Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators
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- Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
- 20 mm Travel Range
- Velocity up to 500 mm/s
- Accelerations up to 20 g
- Resolution to 100 Nanometers
- Integrated Direct-Metrology Linear Encoder
- AutoLock Feature
- XY Combinations Available
- 20000 h MTBF
- Vacuum Versions Available
- Non Magnetic Option
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PDF Datasheet
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HTML Online Catalog Datasheet
M-663
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| PMR 40.08 Rotary Motors |
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- Non Magnetic
- For Low-Speed Applications
- Suited for Hazardous Environments
- Excellent Start-Stop Performance
- Milliseconds Response Time
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Motorized Actuators
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| M-227 High-Resolution DC-Mike Actuators
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- 10, 25 & 50 mm Travel Ranges
- 50 Nanometers Minimum Incremental Motion
- Non-Rotating Tip
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Sub-Nanometer Resolution with Optional PZT Drive
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-227
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| M-228, M-229 Cost-Effective Stepper-Mike Linear Actuator with Limit Switches
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- Cost-Efficient Design
- 10 mm or 25 mm Travel Range
- 46 nm Resolution (with C-663 Controller)
- 50 N Load Capacity (M-229)
- Non-Rotating Tip
- Max. Velocity 1.5 mm/s
- Non-Contact Limit and Reference Switches
- Compact Design
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M-228 PDF Datasheet
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HTML Online Catalog Datasheet
M-228
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M-229 PDF Datasheet
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HTML Online Catalog Datasheet
M-229
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| M-230 High-Resolution Closed-Loop DC-Mike & Stepper Actuators
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- 10 & 25 mm Travel Range
- 50 Nanometers Minimum Incremental Motion
- Non-Rotating Tip
- Velocity to 2 mm/sec.
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Front Mount or Clamp Mount
- >5,000 Hours MTB
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| M-231 High-Resolution Closed-Loop DC-Mike Actuators
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- 17 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Origin and Limit Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-231
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| M-232 Compact, High-Resolution, Closed-Loop DC-Mike Actuator
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- 17 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- Velocity up to 2.5 mm/sec.
- Closed-Loop DC Motor
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit and Origin Switches
- Fits M-105 & F-110 Fiber Aligners
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-232
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| M-235 Heavy-Duty High-Resolution Closed-Loop DC-Mike & Stepper Actuators
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- 20 mm or 50 mm Travel Range
- 100 Nanometers Minimum Incremental Motion
- High-Speed Direct Drive Option
- 120 N Push/Pull Load
- 100 N Lateral Load Limit
- Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
- Closed-Loop DC Motors and Stepper Motors
- Compatible with Leading Industrial Motion Controllers
- Integrated Hall-Effect Limit & Origin Switches
- >20,000 Hours MTBF
- Vacuum Versions
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| M-238 Heavy-Duty Precision Linear DC-Motor Actuator
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- High Load Capacity to 400 N
- Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
- Travel Range to 50 mm
- Max. Velocity: 30 mm/s
- Preloaded Frictionless Ball Screw
- MTBF >20.000 h
Vacuum-Compatible Versions Available for 10-6 hPa
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PDF Datasheet
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HTML Online Catalog Datasheet
M-238
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| M-168 High-Resolution Stepper-Mike Actuators
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- 10, 25 & 50 mm Travel Ranges
- Resolution <100 Nanometers
- 2- and 5-Phase Stepper Motor
- Manual Positioning Knob
- Sub-Nanometer Resolution with Optional PZT Actuator
- >5,000 Hours MTBF
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PDF Datasheet
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HTML Online Catalog Datasheet
M-168
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| M-631 Precision Micrometer Actuators
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- 10, 25 and 50 mm Travel
- Pitch 0.5 mm/Rev.
- Low-Friction Construction
- 1 Micron Manual Sensitivity
- Sub-Nanometer Resolution with Optional PZT Actuator
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| M-653 Differential Micrometer Actuators
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- 100 Nanometers Sensitivity
- 1 Micron Graduations
- Travel to 20 mm
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PDF Datasheet
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HTML Online Catalog Datasheet
M-653
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Flexure-Guided Nanopositioning Actuators
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| P-601 PiezoMove® High-Precision Lever Amplified Z-Actuator with Flexure Guiding
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- Flexure Guidance for Frictionless, Ultra-Straight Motion
- Travel Ranges to 480 Microns
- Resolution to 0.2 Nanometers
- High Dynamics and Stiffness
- PICMA® High-Performance Piezo Actuators
- Open and Closed-Loop Versions
- Ideal for OEM Applications
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PDF Datasheet
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HTML Online Catalog Datasheet
P-601
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| P-783 Piezoelectric Z-Nanopositioning Stage / Actuator with Direct Metrology
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- Z-Axis Travel to 300 Micron
- Low Profile
- Frictionless Precision Flexure Guiding System
- Internal Motion Amplifier
- Closed-Loop Resolution <10 Nanometer
- PICMA® High-Performance Multilayer Piezo Drives
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| P-290 Long-Travel Piezoelectric Z-Nanopositioning Flexure Stage / Actuator
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- Vertical Travel to 1000 Micron
- Integrated Double-Flexure Motion Amplifier
- Non-Magnetic Stainless Steel Design
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PDF Datasheet
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HTML Online Catalog Datasheet
P-290
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| P-753 LISA Piezoelectric NanoAutomation® Stages / Actuators with Direct Metrology
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- Unique Design: Both Stage and Actuator
- Frictionless Precision Flexure Guiding System
- 0.05 Nanometer Resolution
- Direct Metrology with Capacitive Sensors for Highest Precision
- Ultra-Fast Response, Very Compact
- PICMA® High-Performance Multilayer Piezo Drives
- ID-Chip for Auto Calibrate Function
- Vacuum Versions Available
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PDF Datasheet
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HTML Online Catalog Datasheet
P-753
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Piezo Actuators
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| P-882 – P-888
PICMA® High-Performance Monolithic Multilayer Piezo Actuators
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- Award-Winning Technology
- Low Operating Voltage
- Superior Lifetime Even Under Extreme Conditions
- Very Large Operating-Temperature Range
- High Humidity Resistance
- Excellent Temperature Stability
- High Stiffness
- UHV Compatible to 10-9 hPa
- Sub-Millisecond Response & Sub-Nanometer Resolution
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| P-007 – P-056
PICA™-Stack / High Force Piezoceramic Actuators
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- High Load Capacity to 100 kN
- High Force Generation to 80 kN
- Large Cross Sections to 56 mm Diameter
- Variety of Shapes
- Extreme Reliability >1000,000,000 Cycles
- Proven and Flexible Design
- Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
- Vacuum-Compatible Versions
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| PL022 PICMA® Chip Miniature Piezo Actuators
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- Ceramic Encapsulation for Extended Lifetime
- Ultra-Compact, from 2 x 2 x 2 mm
- High Curie Temperature
- Ideal for Dynamic Operation
- Sub-Millisecond Response / Sub-Nanometer Resolution
- UHV Compatible to 10-9 hPa
- Superior Lifetime
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| P-840 - P-845
Preloaded Piezo Translators (LVPZT)
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- Displacement to 90 µm
- Pushing Forces to 3000 N
- Preloaded for Pulling Forces to 700 N
- Sub-msec Response
- Sub-Nanometer Resolution
- Options: Ball Tip, Vacuum Versions
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| P-212 · P-216 & P-225 · P-235 Preloaded PICA™ Power Piezo Translators |
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- Travel Range to 180 µm
- Pushing Forces to 4,500 N or 30,000 N
- Pulling Forces to 500 N or 3,500 N
- Sub-ms Response
- Sub-Nanometer Resolution
- Options: Vacuum, High- and Low-Temperature
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| P-871
Closed-Loop, High-Deflection PICMA® Multilayer Piezo Bender Actuators
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- Closed-Loop Operation for Superior Accuracy
- Nanometer-Range Resolution
- Deflection up to 1.6 mm
- Ceramic Insulation for Extended Lifetime
- Ideal for Scanning Applications
- Vacuum-Compatible Versions
- Low Operating Voltage
- Mounting Hardware Included
- Special Controllers / Drivers Available
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PDF Datasheet
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HTML Online Catalog Datasheet
P-871
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| P-876
DuraAct™ Piezoelectric Patch Transducers
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- Actuator, Sensor or Energy Source
- Highly Formable Ceramics
- Can be Applied to Curved Surfaces
- Customized Solutions on Request
- Cost-Effective
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PDF Datasheet
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HTML Online Catalog Datasheet
P-876
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| PT120 – PT140
Piezoceramic Tubes (HVPZT)
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- Standard & Custom Sizes
- For OEM Applications
- XYZ-Positioning
- Sub-Nanometer Resolution
- Large Diameters to 80 mm
- Wall Thickness as Small as 0.3 mm
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| P-111
PICA™-Shear Piezo Actuators—Compact Multiaxis Motion
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- Compact Multiaxis Actuators
- X, XY, XZ and XYZ Versions
- High Resonant Frequencies
- Extreme Reliability >109 Cycles
- Picometer-Resolution / Sub-Millisecond Settling Time
- Optional Ultra-High-Vacuum-Compatible Versions to 10-9hPa
- Non-Magnetic and Clear Aperture Versions
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PDF Datasheet
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HTML Online Catalog Datasheet
P-111
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