Nano-Precision Actuators: Piezoelectric / Motorized Actuator Solutions for Motion Control Applications


Nexact Piezo Nano-Precision-Actuator
Ultrasonic Precision Actuator
motorized Nano-Precision Actuator
flexure guided Nano-Precision Actuator
Piezo stack Nano Precision Actuator
PiezoWalk® Piezo Stepping Actuators Ultrasonic Linear
Actuators / Motors
Motorized
Actuators
Flexure-Guided Piezo Actuators Piezo Stack
Actuators
 
PI is the leading manufacturer of ultra precision actuators for Nano-Positioning and Micropositioning applications in industries such as: Semiconductors; Biotechnology and Medical Engineering; Lasers, Optics, Microscopy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology.

PI offers 5 different types of actuators:
Nano-Precision Actuator Catalog
Download the Linear
Actuators Catalog

Reasons for Choosing PI      Piezo University: Designing with Piezoelectrics       Groundbreaking Technologies from PI


NEXLINE® / NEXACT® Nano-Positioning Linear Actuators

 

N-310 Compact NEXACT® Nano-Precision OEM Piezo Stepping Drives with Long Travel Ranges

 
Precision Nano-Positioning Actuator N-310 Compact NEXACT
  • 10 mm/sec Speed
  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage (40 V)
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
PDF    HTML Online Catalog Datesheet


Line Precision Linear Actuators

N-381 NEXLINE® Nano-Precision Miniature High-Load Piezo Nano-Positioning Drive

 
Precision Nano-Positioning Actuator N-381 NEXLINE
  • Travel Range 30mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

N-111 NEXLINE® Nano-Precision Miniature High-Load Piezo Nano-Positioning Drive

 
Precision Nano-Positioning Actuator Mini High Load Drive
  • Travel Range 10mm
  • Resolution to 0.025 nm Open-Loop, 5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force Self Locking at Rest,
    No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

N-216 NEXLINE® Nano-Precision Linear Actuator High-Force PiezoWalk® Drive for Long-Range Nanopositioning

 
Precision Nano-Positioning Actuator N-216 Long Range Drive
  • Travel Range 20mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

N-900 Nonmagnetic PiezoWalk-Motor Precision Linear Actuator

 
Precision Nano-Positioning Actuator- Non Magnetic
  • Piezo-Walk Motor-Driven Linear Actuator
  • Works in High Magnetic Fields (MRI)
  • 70mm Motorized Positioning Range
  • Self-Aligning & Self Locking Design
  • Made from non-magnetic materials
  • 5N Force (1 lb)
PDF Datasheet     Ask an Engineer


Line Precision Linear Actuators

M-272 PILine® Cost Effective Linear Drive for Automation

 
Precision Nano-Positioning Actuator M-272 Linear Drive for Automation
  • Force Generation up to 8 N
  • Self-Locking at Rest
  • Velocity up to 200mm/s
  • 5 µm Encoder Resolution
  • Linear Guiding
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

RodDrive Precision Piezo-Motor Actuators

 
Precision Nano-Positioning ActuatorM-674 RodDrive
  • Drive-Component for Integration into Precision Positioning Systems
  • Flexible Choice of Travel Ranges to Several 150mm
  • Flexible Choice of Push/Pull Forces to Several 15 N
  • Minimum Incremental Motion to 50 Nanometers
  • Velocity to 250mm/sec
  • Self-Locking
  • Non Magnetic Option
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

PILine® Precision Ultrasonic Piezo Motors

 
Precision Nano-Positioning Actuator PILine Ultrasonic Piezo Motors
  • Integration levels from economical OEM motors to multi-axis positioning systems
  • Excellent dynamic properties, fast step & settleBasically unlimited travel ranges
  • Easy mechanical integration
  • Self-locking at rest
  • Holding force up to 15 N
  • Velocity up to 500mm/sec
  • Resolution to 0.05 µm (50 nm)
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-661 - M-662 PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motor Actuators

 
Precision Nano-Positioning Actuator M0661, M-662 mini Translation Stages
  • 20mm Travel Range
  • Velocity to 500mm/sec
  • Acceleration to 20 g
  • Resolution to 50 Nanometer
  • Self-Locking
  • XY-Combinations Available
  • 20000 h MTBF
  • Vacuum Versions to 10-7 hPa
  • Non Magnetic Option
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

M-663 PILine® Miniature Precision Translation Stages with Closed-Loop Ultrasonic Piezo Linear Motor Actuators

 
Precision Nano-Positioning Actuator M-663 Mini Translation Stage
  • Smallest Translation Stage with Closed-Loop Linear Motor Drive and Linear Encoder
  • 19mm Travel Range
  • Velocity up to 400mm/sec
  • Accelerations up to 20 g
  • Resolution to 100 Nanometers
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Combinations Available
  • 20000 h MTBF
  • Vacuum Versions Available
  • Non Magnetic Option
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

Motorized Actuators

 

M-227 High-Resolution Servo Motor Precision Actuators

 
Precision Nano-Positioning Actuator M-227 High Res DC Mikes
  • 10, 25 & 50mm Travel Ranges
  • 50 Nanometers Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Precision with Optional PZT Drive
  • >5,000 Hours MTBF
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-228, M-229 Low Cost Precision Motorized Linear Actuator, Stepper-Motor, with Limit Switches

 
Precision Nano-Positioning Actuator M-228, M-229 Cost Effective Stepper Mikes
  • Cost-Efficient Design
  • 10mm or 25 mm Travel Range
  • 46 nm Resolution (with C-663 Controller)
  • 50 N Load Capacity (M-229)
  • Non-Rotating Tip
  • Max. Velocity 1.5 mm/s
  • Non-Contact Limit and Reference Switches
  • Compact Design
M-228 PDF Datasheet     HTML Online Catalog Datasheet
M-229 PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

M-230 High-Resolution Closed-Loop Servo Motor & Stepper Motor Precision Actuators

 
Precision Nano-Positioning Actuator M-230 High Res Closed Loop Mikes
  • 10 & 25 mm Travel Range
  • 50 Nanometers Minimum Incremental Motion
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

M-231 High-Resolution Closed-Loop Servo Motor Precision Actuator

 
Precision Nano-Positioning Actuator
  • 17 mm Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-232 Compact, High-Resolution, Closed-Loop Servo Motor Precision Actuator

 
Precision Nano-Positioning Actuator M-232 Compact High-Res DC-Mikes
  • 17 mm Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators

 
Precision Nano-Positioning Actuator M-235 Hevy-Duty High Resolution Mikes
  • 20mm or 50mm Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

M-238 Heavy-Duty Precision Linear DC-Motor Actuator

 
Precision Nano-Positioning Actuator M-238 Heavy-Duty Precison Linear Mike Actuators
  • High Load Capacity to 400 N
  • Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50mm
  • Max. Velocity: 30mm/sec
  • Preloaded Frictionless Ball Screw
  • MTBF >20.000 h Vacuum-Compatible Versions Available
    for 10-6 hPa
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-168 High-Resolution Motorized Stepper-Mike Actuators

 
Precision Nano-Positioning Actuator M-168 High-Res Stepper Mikes
  • 10, 25 & 50mm Travel Ranges
  • Resolution <100 Nanometers
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Precision with Optional PZT Actuator
  • >5,000 Hours MTBF
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

M-631 Precision Micrometer Actuators

 
Precision Nano-Positioning Actuator M-631 Precison Micrometer Actuators
  • 10, 25 and 50mm Travel
  • Pitch 0.5 mm/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nanometer Resolution with Optional PZT Actuator
PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

M-653 Differential Micrometer Actuators

 
Precision Nano-Positioning Actuator M-653 Differential Micrometer Drives
  • 100 Nanometers Sensitivity
  • 1 Micron Graduations
  • Travel to 20mm
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

Flexure-Guided Nano-Positioning Actuators

 

P-601 PiezoMove Nano-Precision Lever Amplified Z-Actuator with Flexure Guiding

 
Precision Nano-Positioning Actuator P-601 PiezoMove Flexure-Guided Actuator
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Microns
  • Resolution to 0.2 Nanometers
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-602 PiezoMove Nano-Precision Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges

 
Precision Nano-Positioning Actuator P-602 PiezoMove Long Travel Flexure Actuator
  • Frictionless Flexure Guiding System for Straight Motion
  • Integrated Motion Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
  • Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-603 PiezoMove Linear Nano-Precision Actuator: Low-cost and with Large Travel Ranges

 
Precision Nano-Positioning Actuator P-603 PiezoMove Low-Cost, Long Travel Actuator
  • Frictionless, High-Precision Flexure Guiding System
  • Travel Ranges to 500 microns
  • Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-290 Long-Travel Piezoelectric Z-Nano-Precision Flexure Stage / Actuator

 
Precision Nano-Positioning Actuator P-290 long-Travel Flexure Stage
  • Vertical Travel to 1000 Micron
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-753 LISA Piezoelectric Nano-Precision Stages / Actuators for NanoAutomation®. Featuring Direct Metrology

 
Precision Nano-Positioning Actuator P-753 NanoAutomation Stage
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nanometer Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

Piezo Actuators

 

P-882 – P-888 PICMA® High-Performance Monolithic Multilayer Piezo Actuators

 
Precision Nano-Positioning Actuator PICMA Monolithis Multilayer Piezo Actuator
  • Award-Winning Technology
  • Low Operating Voltage
  • Superior Lifetime Even Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nanometer Precision
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-007 – P-056 PICA-Stack / High Force Piezoceramic Actuators

 
Precision Nano-Positioning Actuator PICA Stack Actuators
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >1000,000,000 Cycles
  • Proven and Flexible Design
  • Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions
PDF Datasheet         HTML Online Catalog Datasheet


Line Precision Linear Actuators

PL022 PICMA® Chip Miniature Piezo Actuators

 
Precision Nano-Positioning Actuator PICMA Chip Actuators
  • Ceramic Encapsulation for Extended Lifetime
  • Ultra-Compact, from 2 x 2 x 2 mm
  • High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-840 - P-845 Preloaded Nano-Precision Piezo Translators (LVPZT)

 
Precision Nano-Positioning Actuator Preloaded Piezo Translators
  • Displacement to 90 microns
  • Pushing Forces to 3000 N
  • Preloaded for Pulling Forces to 700 N
  • Sub-msec Response
  • Sub-Nanometer Resolution
  • Options: Ball Tip, Vacuum Versions
P-840 · P-841 PDF Datasheet     HTML Online Catalog Datasheet
P-844 · P-845 PDF Datasheet     HTML Online Catalog Datasheet    


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Line Precision Linear Actuators

P-212 · P-216 & P-225 · P-235 Preloaded PICA™ Power Nano-Precision Piezo Actuators

 
  • Travel Range to 180 microns
  • Pushing Forces to 4,500 N or 30,000 N
  • Pulling Forces to 500 N or 3,500 N
  • Sub-ms Response
  • Sub-Nanometer Precision
  • Options: Vacuum, High- and Low-Temperature
P-212 · P-216 PDF Datasheet     HTML Online Catalog Datasheet
P-225 · P-235 PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-871 Closed-Loop, High-Deflection PICMA® Multilayer Nano-Precision Piezo Bender Actuators

 
Precision Nano-Positioning Actuator PICMA Multilayer Piezo Bender Actuators
  • Closed-Loop Operation for Superior Accuracy
  • Nanometer-Range Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Operating Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-876 DuraAct™ Piezoelectric Patch Transducers

 
Precision Nano-Positioning Actuator P-876 Piezoelectric Patch Transducers
  • Actuator, Sensor or Energy Source
  • Highly Formable Ceramics
  • Can be Applied to Curved Surfaces
  • Customized Solutions on Request
  • Cost-Effective
PDF Datasheet      HTML Online Catalog Datasheet


Line Precision Linear Actuators

PT120 – PT140 Piezoceramic Tubes (HVPZT)

 
Precision Nano-Positioning Actuator Piezoelectric Tubes
  • Standard & Custom Sizes
  • For OEM Applications
  • XYZ-Positioning
  • Sub-Nanometer Resolution
  • Large Diameters to 80mm
  • Wall Thickness as Small as 0.3 mm
PDF Datasheet     HTML Online Catalog Datasheet


Line Precision Linear Actuators

P-111 PICA™-Shear Piezo Actuators: High Precision, Small, Multi-Axis Motion

 
Precision Nano-Positioning Actuator PICA Shear Piezo Actuators
  • Compact Multiaxis Actuators
  • X, XY, XZ and XYZ Versions
  • High Resonant Frequencies
  • Extreme Reliability >109 Cycles
  • Picometer-Resolution / Sub-Millisecond Settling Time
  • Optional Ultra-High-Vacuum-Compatible Versions to 10-9hPa
  • Non-Magnetic and Clear Aperture Versions
PDF Datasheet     HTML Online Catalog Datasheet    


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