Nanometer-Precision Actuators: Piezoelectric & Motorized Linear Motion Solutions for Nanometer Accuracy Applications

NEXLINE^® / NEXACT^® Nano-Positioning Linear Actuators

N-310 Compact NEXACT^® Nanometer-Resolution OEM Piezo Stepping Drives with Long Travel Ranges

• 10 mm/sec Speed
• 20 mm Standard Travel Range
• Compact and Cost-Effective Design
• 0.03 nm Resolution
• To 10 N Push/Pull Force
• Low Operating Voltage (40 V)
• Self Locking, with no Heat Dissipation, Nanometer Stability
• Non-Magnetic and Vacuum-Compatible Working Principle

N-381 NEXLINE^® Nanometer-Precision Piezo Nano-Positioning Actuator

• Travel Range 30mm
• Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
• Very High Acceleration, e.g. for Cell Penetration
• Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
• Up to 10 N Force Generation
• Self-Locking at Rest, no Heat Generation
• Smooth Motion, no Closed-Loop Jitter
• Vacuum-Compatible and Non-Magnetic Versions

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N-111 NEXLINE^® Miniature PiezoMotor Acuator with Nanometer Accuracy

• Travel Range 10mm
• Resolution to 0.025 nm Open-Loop, 5 nm Closed-Loop
• Up To 50 N Force Generation and 70 N Holding Force Self Locking at Rest,
  No Heat Generation
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

N-216 NEXLINE^® Linear Actuator with High-Force PiezoWalk^® Drive and Nanometer Accuracy for Long-Range Nanopositioning

• Travel Range 20mm
• Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
• Up to 800 N Holding Force
• Self-Locking at Rest
• Non-Magnetic and Vacuum-Compatible Working Principle
• Cleanroom Compatible

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N-900 Nonmagnetic PiezoWalk-Motor Precision Linear Actuator with Nanometer Resolution

• Piezo-Walk Motor-Driven Linear Actuator
• Works in High Magnetic Fields (MRI)
• 70mm Motorized Positioning Range
• Self-Aligning & Self Locking Design
• Made from non-magnetic materials
• 5N Force (1 lb)

Fast Automation Precision Actuator with Voice Coil Linear Motor

• Different Models, Force Generation up to 20 N
• High Speed, to 750mm/sec
• Closed-Loop Force and Position Control
• Integrated Linear Encoder
• Optional Force Sensor

Ultrasonic-Motor-Driven Miniature Precision Positioner

• Compact High-Speed Stage with Closed-Loop Linear Motor & Linear Encoder
• 18mm to 100mm Travel Range
• Velocity up to 200mm/sec
• Resolution to 10 Nanometers
• Integrated Direct-Metrology Linear Encoder
• AutoLock Feature
• XY Stage Available
• 20000 h MTBF
• Vacuum Versions Available
• Non Magnetic Option

Motorized Actuators

M-227 High-Resolution Servo Motor Precision Actuators

• 10, 25 & 50mm Travel Ranges
• 50 Nanometers Minimum Incremental Motion
• Non-Rotating Tip
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Sub-Nanometer Precision with Optional PZT Drive
• >5,000 Hours MTBF

M-228, M-229 Low Cost Precision Motorized Linear Actuator, Stepper-Motor, with Limit Switches

• Cost-Efficient Design
• 10mm or 25 mm Travel Range
• 46 nm Resolution (with C-663 Controller)
• 50 N Load Capacity (M-229)
• Non-Rotating Tip
• Max. Velocity 1.5 mm/s
• Non-Contact Limit and Reference Switches
• Compact Design

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M-230 High-Resolution Closed-Loop Servo Motor & Stepper Motor Precision Actuators

• 10 & 25 mm Travel Range
• 50 Nanometers Minimum Incremental Motion
• 10 Nanometer Resolution
• Non-Rotating Tip
• Velocity to 2 mm/sec.
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Origin and Limit Switches
• Front Mount or Clamp Mount
• >5,000 Hours MTB

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M-232 Compact, High-Resolution, Closed-Loop Servo Motor Precision Actuator

• 17 mm Travel Range
• 100 Nanometers Minimum Incremental Motion
• Velocity up to 2.5 mm/sec.
• Closed-Loop DC Motor
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit and Origin Switches
• Fits M-105 & F-110 Fiber Aligners
• >5,000 Hours MTBF

M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators

• 20mm or 50mm Travel Range
• 100 Nanometers Minimum Incremental Motion
• High-Speed Direct Drive Option
• 120 N Push/Pull Load
• 100 N Lateral Load Limit
• Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
• Closed-Loop DC Motors and Stepper Motors
• Compatible with Leading Industrial Motion Controllers
• Integrated Hall-Effect Limit & Origin Switches
• >20,000 Hours MTBF
• Vacuum Versions

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M-238 Heavy-Duty Precision Linear DC-Motor Actuator

• High Load Capacity to 400 N
• Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
• Travel Range to 50mm
• Max. Velocity: 30mm/sec
• Preloaded Frictionless Ball Screw
• MTBF >20.000 h Vacuum-Compatible Versions Available
  for 10^-6 hPa

M-168 High-Resolution Motorized Stepper-Mike Actuators

• 10, 25 & 50mm Travel Ranges
• Resolution <100 Nanometers
• 2- and 5-Phase Stepper Motor
• Manual Positioning Knob
• Sub-Nanometer Precision with Optional PZT Actuator
• >5,000 Hours MTBF

Precision Micrometer Actuators

• 10, 25 and 50mm Travel
• Pitch 0.5 mm/Rev.
• Low-Friction Construction
• 1 Micron Manual Sensitivity
• Sub-Nanometer Resolution with Optional PZT Actuator

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Flexure-Guided Nano-Positioning Actuators

P-601 Nanometer Accuracy Piezo Lever Amplified Actuator with Flexure Guiding

• Flexure Guidance for Frictionless, Ultra-Straight Motion
• Travel Ranges to 480 Microns
• 0.2 Nanometer Resolution
• High Dynamics and Stiffness
• PICMA^® High-Performance Piezo Actuators
• Open and Closed-Loop Versions
• Ideal for OEM Applications

P-602 Nanometer Accuracy Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges

• Frictionless Flexure Guiding System for Straight Motion
• Integrated Motion Amplifier for Travel Ranges to 1 mm
• High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
• Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
• Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics

P-603 Nanometer Accuracy Linear Actuator: Low-cost, Flexure Guided, Large Travel Ranges

• Frictionless, High-Precision Flexure Guiding System
• Travel Ranges to 500 microns
• Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
• Available with Integrated Position Sensor
• Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
• Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible

P-290 Long-Travel Piezoelectric Z-Nano-Precision Flexure Stage / Actuator

• Vertical Travel to 1000 Micron
• Integrated Double-Flexure Motion Amplifier
• Non-Magnetic Stainless Steel Design

P-753 LISA Piezoelectric Positioning Stage with Nanometer Accuracy for NanoAutomation®. Featuring Direct Metrology

• Unique Design: Both Stage and Actuator
• Frictionless Precision Flexure Guiding System
• 0.05 Nanometer Resolution
• Direct Metrology with Capacitive Sensors for Highest Precision
• Ultra-Fast Response, Very Compact
• PICMA^® High-Performance Multilayer Piezo Drives
• ID-Chip for Auto Calibrate Function
• Vacuum Versions Available

Piezo Actuators

P-882 – P-888 PICMA^® High-Performance Monolithic Multilayer Piezo Actuators, Sub-Nanometer Resolution

• Award-Winning Technology
• Low Operating Voltage
• Superior Lifetime Even Under Extreme Conditions
• Very Large Operating-Temperature Range
• High Humidity Resistance
• Excellent Temperature Stability
• High Stiffness
• UHV Compatible to 10-⁹ hPa
• Sub-Millisecond Response & Sub-Nanometer Precision

P-007 – P-056 PICA^™-Stack / High Force Piezoceramic Actuators, Sub-Nanometer Resolution

• High Load Capacity to 100 kN
• High Force Generation to 80 kN
• Large Cross Sections to 56 mm Diameter
• Variety of Shapes
• Extreme Reliability >1000,000,000 Cycles
• Proven and Flexible Design
• Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
• Vacuum-Compatible Versions

PL022 PICMA^® Chip Miniature Piezo Actuators

• Ceramic Encapsulation for Extended Lifetime
• Ultra-Compact, from 2 x 2 x 2 mm
• High Curie Temperature
• Ideal for Dynamic Operation
• Sub-Millisecond Response / Sub-Nanometer Resolution
• UHV Compatible to 10-9 hPa
• Superior Lifetime

P-840 - P-845 Preloaded Piezo Translators (LVPZT), Sub-Nanometer Resolution

• Displacement to 90 microns
• Pushing Forces to 3000 N
• Preloaded for Pulling Forces to 700 N
• Sub-msec Response
• Sub-Nanometer Resolution
• Options: Ball Tip, Vacuum Versions

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P-212 · P-216 & P-225 · P-235 Preloaded PICA™ Power Nano-Precision Piezo Actuators, High Force

• Travel Range to 180 microns
• Pushing Forces to 4,500 N or 30,000 N
• Pulling Forces to 500 N or 3,500 N
• Sub-ms Response
• Sub-Nanometer Precision
• Options: Vacuum, High- and Low-Temperature

P-871 Closed-Loop, High-Deflection PICMA^® Multilayer Nano-Precision Piezo Bender Actuators

• Closed-Loop Operation for Superior Accuracy
• Nanometer-Resolution
• Deflection up to 1.6 mm
• Ceramic Insulation for Extended Lifetime
• Ideal for Scanning Applications
• Vacuum-Compatible Versions
• Low Operating Voltage
• Mounting Hardware Included
• Special Controllers / Drivers Available

P-876 DuraAct™ Piezoelectric Patch Transducers

• Actuator, Sensor or Energy Source
• Highly Formable Ceramics
• Can be Applied to Curved Surfaces
• Customized Solutions on Request
• Cost-Effective

PT120 – PT140 Piezoceramic Tubes (HVPZT)

• Standard & Custom Sizes
• For OEM Applications
• XYZ-Positioning
• Sub-Nanometer Resolution
• Large Diameters to 80mm
• Wall Thickness as Small as 0.3 mm

P-111 Piezo Shear Actuators: High Precision, Small, Multi-Axis Motion

• Compact Multiaxis Actuators
• X, XY, XZ and XYZ Versions
• High Resonant Frequencies
• Extreme Reliability >10⁹ Cycles
• Picometer-Resolution / Sub-Millisecond Settling Time
• Optional Ultra-High-Vacuum-Compatible Versions to 10^-9hPa
• Non-Magnetic and Clear Aperture Versions

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