Nanometer-Precision Actuators: Piezoelectric & Motorized Linear Motion Solutions for Nanometer Accuracy Applications


Nexact Piezo Nano-Precision-Actuator
Ultrasonic Precision Actuator
motorized Nano-Precision Actuator
flexure guided Nano-Precision Actuator
Piezo stack Nano Precision Actuator
PiezoWalk® Piezo Stepping Actuators Voice-Coil &
Ultrasonic Motors
Motorized
Actuators
Flexure-Guided Piezo Actuators Piezo Stack
Actuators
 
PI is the leading manufacturer of actuators and stages with nanometer accuracy for precision motion and Micropositioning applications in industries such as: Semiconductors; Biotechnology and Medical Engineering; Lasers, Optics, Microscopy; Aerospace Engineering; Precision Machining; Astronomy and Microsystems Technology.

PI offers 6 different types of actuators:
Nano-Precision Actuator Catalog
Download the Linear
Actuators Catalog

About PI - Company & Technologies Background       Piezo University: Designing with Piezoelectrics       Products & Technologies Overview


NEXLINE® / NEXACT® Nano-Positioning Linear Actuators

 

N-310 Compact NEXACT® Nanometer-Resolution OEM Piezo Stepping Drives with Long Travel Ranges

 
Precision Nano-Positioning Actuator N-310 Compact NEXACT
  • 10 mm/sec Speed
  • 20 mm Standard Travel Range
  • Compact and Cost-Effective Design
  • 0.03 nm Resolution
  • To 10 N Push/Pull Force
  • Low Operating Voltage (40 V)
  • Self Locking, with no Heat Dissipation, Nanometer Stability
  • Non-Magnetic and Vacuum-Compatible Working Principle
PDF    Learn About Different Piezo Motors


Line Precision Linear Actuators

N-381 NEXLINE® Nanometer-Precision Piezo Nano-Positioning Actuator

 
Precision Nano-Positioning Actuator N-381 NEXLINE
  • Travel Range 30mm
  • Novel, Zero-Wear Piezo Stepping Drive, Ideal for Micro- and Nano-Manipulation Integrated Linear Encoder Option for Highest Accuracy with 20 nm Resolution
  • Very High Acceleration, e.g. for Cell Penetration
  • Two Operating Modes: Continuous Stepping Mode and Continuously Variable, High-Dynamics Analog Mode for 30 pm Resolution**
  • Up to 10 N Force Generation
  • Self-Locking at Rest, no Heat Generation
  • Smooth Motion, no Closed-Loop Jitter
  • Vacuum-Compatible and Non-Magnetic Versions
PDF Datasheet     Learn About Different Piezo Motors    


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Line Precision Linear Actuators

N-111 NEXLINE® Miniature PiezoMotor Acuator with Nanometer Accuracy

 
Precision Nano-Positioning Actuator Mini High Load Drive
  • Travel Range 10mm
  • Resolution to 0.025 nm Open-Loop, 5 nm Closed-Loop
  • Up To 50 N Force Generation and 70 N Holding Force Self Locking at Rest,
    No Heat Generation
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
PDF Datasheet     Animation How NEXLINE Motors Work


Line Precision Linear Actuators

N-216 NEXLINE® Linear Actuator with High-Force PiezoWalk® Drive and Nanometer Accuracy for Long-Range Nanopositioning

 
Precision Nano-Positioning Actuator N-216 Long Range Drive
  • Travel Range 20mm
  • Resolutionto 0.03 nm Open-Loop, 5 nm Closed-Loop
  • Up to 800 N Holding Force
  • Self-Locking at Rest
  • Non-Magnetic and Vacuum-Compatible Working Principle
  • Cleanroom Compatible
PDF Datasheet     Animation How PiezoWalk Motors Work    


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Line Precision Linear Actuators

N-900 Nonmagnetic PiezoWalk-Motor Precision Linear Actuator with Nanometer Resolution

 
Precision Nano-Positioning Actuator- Non Magnetic
  • Piezo-Walk Motor-Driven Linear Actuator
  • Works in High Magnetic Fields (MRI)
  • 70mm Motorized Positioning Range
  • Self-Aligning & Self Locking Design
  • Made from non-magnetic materials
  • 5N Force (1 lb)
PDF Datasheet     Ask an Engineer


LIne,  Precision Linear Actuators

Fast Automation Precision Actuator with Voice Coil Linear Motor

 
Fast Voice Coil Precision Actuator V273 Voice Coil Linear Drive for Automation
  • Different Models, Force Generation up to 20 N
  • High Speed, to 750mm/sec
  • Closed-Loop Force and Position Control
  • Integrated Linear Encoder
  • Optional Force Sensor
Video and Application Article


Line Precision Linear Actuators



Line Precision Linear Actuators

Ultrasonic-Motor-Driven Miniature Precision Positioner

 
Precision Nanometer -Positioning Actuator U-651 Mini Translation Stage
  • Compact High-Speed Stage with Closed-Loop Linear Motor & Linear Encoder
  • 18mm to 100mm Travel Range
  • Velocity up to 200mm/sec
  • Resolution to 10 Nanometers
  • Integrated Direct-Metrology Linear Encoder
  • AutoLock Feature
  • XY Stage Available
  • 20000 h MTBF
  • Vacuum Versions Available
  • Non Magnetic Option
PDF Datasheet     Overview: Compact Positioning Stages with Ultrasonic Motors


Line Precision Linear Actuators

Motorized Actuators

 

M-227 High-Resolution Servo Motor Precision Actuators

 
Precision Nanometer -Positioning Actuator M-227 High Res DC Mikes
  • 10, 25 & 50mm Travel Ranges
  • 50 Nanometers Minimum Incremental Motion
  • Non-Rotating Tip
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Sub-Nanometer Precision with Optional PZT Drive
  • >5,000 Hours MTBF
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

M-228, M-229 Low Cost Precision Motorized Linear Actuator, Stepper-Motor, with Limit Switches

 
Precision Nano-Positioning Actuator M-228, M-229 Cost Effective Stepper Mikes
  • Cost-Efficient Design
  • 10mm or 25 mm Travel Range
  • 46 nm Resolution (with C-663 Controller)
  • 50 N Load Capacity (M-229)
  • Non-Rotating Tip
  • Max. Velocity 1.5 mm/s
  • Non-Contact Limit and Reference Switches
  • Compact Design
M-228 PDF Datasheet    
M-229 PDF Datasheet     M-228 - M-229 Linear Actuator Online Datasheet    


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Line Precision Linear Actuators

M-230 High-Resolution Closed-Loop Servo Motor & Stepper Motor Precision Actuators

 
Precision Nano-Positioning Actuator M-230 High Res Closed Loop Mikes
  • 10 & 25 mm Travel Range
  • 50 Nanometers Minimum Incremental Motion
  • 10 Nanometer Resolution
  • Non-Rotating Tip
  • Velocity to 2 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Origin and Limit Switches
  • Front Mount or Clamp Mount
  • >5,000 Hours MTB
PDF Datasheet     Linear Actuator Online Datasheet    


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Line Precision Linear Actuators

M-232 Compact, High-Resolution, Closed-Loop Servo Motor Precision Actuator

 
Precision Nano-Positioning Actuator M-232 Compact High-Res DC-Mikes
  • 17 mm Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • Velocity up to 2.5 mm/sec.
  • Closed-Loop DC Motor
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit and Origin Switches
  • Fits M-105 & F-110 Fiber Aligners
  • >5,000 Hours MTBF
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

M-235 Heavy-Duty High-Resolution Closed-Loop Servo & Stepper Actuators

 
Precision Nano-Positioning Actuator M-235 Hevy-Duty High Resolution Mikes
  • 20mm or 50mm Travel Range
  • 100 Nanometers Minimum Incremental Motion
  • High-Speed Direct Drive Option
  • 120 N Push/Pull Load
  • 100 N Lateral Load Limit
  • Preloaded Ultra-Low-Friction Ball Screw with Non-Rotating Tip
  • Closed-Loop DC Motors and Stepper Motors
  • Compatible with Leading Industrial Motion Controllers
  • Integrated Hall-Effect Limit & Origin Switches
  • >20,000 Hours MTBF
  • Vacuum Versions
PDF Datasheet     Linear Actuator Online Datasheet    


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Line Precision Linear Actuators

M-238 Heavy-Duty Precision Linear DC-Motor Actuator

 
Precision Nano-Positioning Actuator M-238 Heavy-Duty Precison Linear Mike Actuators
  • High Load Capacity to 400 N
  • Optional 100 Nanometers Direct Metrology Linear Encoder for Exceptional Precision
  • Travel Range to 50mm
  • Max. Velocity: 30mm/sec
  • Preloaded Frictionless Ball Screw
  • MTBF >20.000 h Vacuum-Compatible Versions Available
    for 10-6 hPa
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

M-168 High-Resolution Motorized Stepper-Mike Actuators

 
Precision Nano-Positioning Actuator M-168 High-Res Stepper Mikes
  • 10, 25 & 50mm Travel Ranges
  • Resolution <100 Nanometers
  • 2- and 5-Phase Stepper Motor
  • Manual Positioning Knob
  • Sub-Nanometer Precision with Optional PZT Actuator
  • >5,000 Hours MTBF
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

Precision Micrometer Actuators

 
Precision Nano-Positioning Actuator M-631 Precison Micrometer Actuators
  • 10, 25 and 50mm Travel
  • Pitch 0.5 mm/Rev.
  • Low-Friction Construction
  • 1 Micron Manual Sensitivity
  • Sub-Nanometer Resolution with Optional PZT Actuator
PDF Datasheet     Linear Actuator Online Datasheet    


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Line Precision Linear Actuators



Line Precision Linear Actuators

Flexure-Guided Nano-Positioning Actuators

 

P-601 Nanometer Accuracy Piezo Lever Amplified Actuator with Flexure Guiding

 
Nanometer Accuracy Actuator P-601  Flexure-Guided Actuator
  • Flexure Guidance for Frictionless, Ultra-Straight Motion
  • Travel Ranges to 480 Microns
  • 0.2 Nanometer Resolution
  • High Dynamics and Stiffness
  • PICMA® High-Performance Piezo Actuators
  • Open and Closed-Loop Versions
  • Ideal for OEM Applications
PDF Datasheet     Introduction to Flexure Actuators


Line Precision Linear Actuators

P-602 Nanometer Accuracy Flexure Actuator with High Stiffness. Integrated Guiding System, High Force and Large Travel Ranges

 
Nanometer Accuracy Positioning Actuator P-602  Long Travel Flexure Actuator
  • Frictionless Flexure Guiding System for Straight Motion
  • Integrated Motion Amplifier for Travel Ranges to 1 mm
  • High Dynamics and Stiffness, Forces to 400 N, Backlash-Free Construction
  • Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
  • Ideal for OEM-Applications in Adaptronics, Biotechnology or Microfluidics
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-603 Nanometer Accuracy Linear Actuator: Low-cost, Flexure Guided, Large Travel Ranges

 
Nanometer Accuracy Nano-Positioning Actuator P-603  Low-Cost, Long Travel Actuator
  • Frictionless, High-Precision Flexure Guiding System
  • Travel Ranges to 500 microns
  • Cost-Effective Design Outstanding Lifetime Due to PICMA® Piezo Actuators
  • Available with Integrated Position Sensor
  • Ideal OEM Actuators for Precision Motion Control in Optics, Medical, Biotech and Microfluidics Applications
  • Custom Designs with Larger Travel or Faster Response and Non-Magnetic Versions Feasible
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-290 Long-Travel Piezoelectric Z-Nano-Precision Flexure Stage / Actuator

 
Precision Nano-Positioning Actuator P-290 long-Travel Flexure Stage
  • Vertical Travel to 1000 Micron
  • Integrated Double-Flexure Motion Amplifier
  • Non-Magnetic Stainless Steel Design
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-753 LISA Piezoelectric Positioning Stage with Nanometer Accuracy for NanoAutomation®. Featuring Direct Metrology

 
Precision Nano-Positioning Actuator P-753 NanoAutomation Stage
  • Unique Design: Both Stage and Actuator
  • Frictionless Precision Flexure Guiding System
  • 0.05 Nanometer Resolution
  • Direct Metrology with Capacitive Sensors for Highest Precision
  • Ultra-Fast Response, Very Compact
  • PICMA® High-Performance Multilayer Piezo Drives
  • ID-Chip for Auto Calibrate Function
  • Vacuum Versions Available
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

Piezo Actuators

 

P-882 – P-888 PICMA® High-Performance Monolithic Multilayer Piezo Actuators, Sub-Nanometer Resolution

 
Precision Nano-Positioning Actuator PICMA Monolithis Multilayer Piezo Actuator
  • Award-Winning Technology
  • Low Operating Voltage
  • Superior Lifetime Even Under Extreme Conditions
  • Very Large Operating-Temperature Range
  • High Humidity Resistance
  • Excellent Temperature Stability
  • High Stiffness
  • UHV Compatible to 10-9 hPa
  • Sub-Millisecond Response & Sub-Nanometer Precision
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-007 – P-056 PICA-Stack / High Force Piezoceramic Actuators, Sub-Nanometer Resolution

 
Precision Nano-Positioning Actuator PICA Stack Actuators
  • High Load Capacity to 100 kN
  • High Force Generation to 80 kN
  • Large Cross Sections to 56 mm Diameter
  • Variety of Shapes
  • Extreme Reliability >1000,000,000 Cycles
  • Proven and Flexible Design
  • Sub-Nanometer-Resolution / Sub-Millisecond-Settling-Time
  • Vacuum-Compatible Versions
PDF Datasheet         Linear Actuator Online Datasheet


Line Precision Linear Actuators

PL022 PICMA® Chip Miniature Piezo Actuators

 
Precision Nano-Positioning Actuator PICMA Chip Actuators
  • Ceramic Encapsulation for Extended Lifetime
  • Ultra-Compact, from 2 x 2 x 2 mm
  • High Curie Temperature
  • Ideal for Dynamic Operation
  • Sub-Millisecond Response / Sub-Nanometer Resolution
  • UHV Compatible to 10-9 hPa
  • Superior Lifetime
PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-840 - P-845 Preloaded Piezo Translators (LVPZT), Sub-Nanometer Resolution

 
Precision Nano-Positioning Actuator Preloaded Piezo Translators
  • Displacement to 90 microns
  • Pushing Forces to 3000 N
  • Preloaded for Pulling Forces to 700 N
  • Sub-msec Response
  • Sub-Nanometer Resolution
  • Options: Ball Tip, Vacuum Versions
P-840 · P-841 PDF Datasheet     Linear Actuator Online Datasheet
P-844 · P-845 PDF Datasheet     Linear Actuator Online Datasheet    


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Line Precision Linear Actuators

P-212 · P-216 & P-225 · P-235 Preloaded PICA™ Power Nano-Precision Piezo Actuators, High Force

 
  • Travel Range to 180 microns
  • Pushing Forces to 4,500 N or 30,000 N
  • Pulling Forces to 500 N or 3,500 N
  • Sub-ms Response
  • Sub-Nanometer Precision
  • Options: Vacuum, High- and Low-Temperature
P-212 · P-216 PDF Datasheet     Linear Actuator Online Datasheet
P-225 · P-235 PDF Datasheet     Linear Actuator Online Datasheet


Line Precision Linear Actuators

P-871 Closed-Loop, High-Deflection PICMA® Multilayer Nano-Precision Piezo Bender Actuators

 
Precision Nano-Positioning Actuator PICMA Multilayer Piezo Bender Actuators
  • Closed-Loop Operation for Superior Accuracy
  • Nanometer-Resolution
  • Deflection up to 1.6 mm
  • Ceramic Insulation for Extended Lifetime
  • Ideal for Scanning Applications
  • Vacuum-Compatible Versions
  • Low Operating Voltage
  • Mounting Hardware Included
  • Special Controllers / Drivers Available
PDF Datasheet     Bender Actuator Overview


Line Precision Linear Actuators

P-876 DuraAct™ Piezoelectric Patch Transducers

 
Precision Nano-Positioning Actuator P-876 Piezoelectric Patch Transducers
  • Actuator, Sensor or Energy Source
  • Highly Formable Ceramics
  • Can be Applied to Curved Surfaces
  • Customized Solutions on Request
  • Cost-Effective
PDF Datasheet      Linear Actuator Online Datasheet


Line Precision Linear Actuators

PT120 – PT140 Piezoceramic Tubes (HVPZT)

 
Precision Nano-Positioning Actuator Piezoelectric Tubes
  • Standard & Custom Sizes
  • For OEM Applications
  • XYZ-Positioning
  • Sub-Nanometer Resolution
  • Large Diameters to 80mm
  • Wall Thickness as Small as 0.3 mm
PDF Datasheet     PZT Tube Actuator Online Datasheet


Line Precision Linear Actuators

P-111 Piezo Shear Actuators: High Precision, Small, Multi-Axis Motion

 
Precision Nano-Positioning Actuator PICA Shear Piezo Actuators
  • Compact Multiaxis Actuators
  • X, XY, XZ and XYZ Versions
  • High Resonant Frequencies
  • Extreme Reliability >109 Cycles
  • Picometer-Resolution / Sub-Millisecond Settling Time
  • Optional Ultra-High-Vacuum-Compatible Versions to 10-9hPa
  • Non-Magnetic and Clear Aperture Versions
PDF Datasheet     Shear Actuator Online Datasheet    


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